Ebook Download | Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing) | In this excellent text Professor Wei Gao from Tohoku University describes the essential aspects of a relatively new discipline: precision nanometrology. This forms a new field of dimensional metrology that is defined as the science of dimensional measurement with nanometric accuracy over a broad measurement range from micrometres to metres. The focus is also on nanomanufacturing. The contents of the book are essentially a comprehensive summary of the research work of the author over the last decade or so. The strong group at Tohoku University, whom I was very impressed with during a recent visit, focus on the development of novel sensing technologies and measurement techniques. The main measurands include the surface form of precision workpieces and stage motion of precision machines - again with the emphasis on nanomanufacturing.
The book presents a number of basic, principles, but importantly, the author highlights these principles with real-life case studies that have been developed in his group. The principles of scanning mechanisms and errors, alignment, error separation, surface measurement, probe microscopy and scanning image-sensor systems are all comprehensively covered. All the necessary mathematics is included in the examples and case studies, and the whole book is packed full of useful photographs, schemas, graphs and tables. This book will be an essential text for all those involved in nanometrology and the broader subject of nanomanufacturing, and should sit on the shelf of students and researchers alike.
