Ebook Download | Silicon VLSI Technology: Fundamentals, Practice, and Modeling | Before this book was published, Wolf & Tauber's book was the only good reference I had. Plummer's new book has a thorough review of basic principles, very well updated parts on current manufacturing equipments (Wolf's book also has extensive coverage in this respect). The best part in my opinion is oxidation & diffusion parts where the authors are one of the leaders in current research. The book not only focuses on the specific details, but also gives an integrated view of the whole CMOS fabrication process, which I enjoyed a lot. I strongly recommend this book for students who want to learn basics of IC fabrication and also professional engineers who needs a good and well updated reference.
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